If you're sure that the other pieces aren't limiting the flow, then you might be able to try running some sort of cleaner through it, but I don't know how sensitive the sensor would be to solvents though.
I tried running brake cleaner through mine, but it didn't do anything. I think the sensor was dead a long time before that.
Like I said, if you know the other two components of the EGR system aren't bad (EGR Valve & EGR Vacuum Regulator) then try it. Also check the rubber hoses that run up from the EGR tube to the DPFE sensor. Those could have a clog in it or just be bad from age, mine were all cracked and brittle.
Good Luck..
Dave